Single mode and polarization independence in the strained silicon-on-insulator rib waveguides
نویسندگان
چکیده
منابع مشابه
Tunable Bragg reflectors on silicon-on-insulator rib waveguides.
We present the design, fabrication and characterization of Bragg reflectors on silicon-on-insulator rib waveguides. The fabrication is based on a new double lithographic process, combining electron-beam lithography for the grating and photolithography for the waveguides. This process allows the realization of low loss reflectors, which were fully characterized. The influence of the etching dept...
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In an effort to find low-cost alternatives for components currently used in dense wavelength division multiplexing, optical ring resonators fabricated on silicon on insulator are currently being investigated. Their performance can be further enhanced if they are polarization independent. Herein we use rib waveguides to control the polarization properties of the devices and hence produce polariz...
متن کاملLosses in single-mode silicon-on-insulator strip waveguides and bends.
We report the fabrication and accurate measurement of propagation and bending losses in single-mode silicon waveguides with submicron dimensions fabricated on silicon-on-insulator wafers. Owing to the small sidewall surface roughness achieved by processing on a standard 200mm CMOS fabrication line, minimal propagation losses of 3.6+/-0.1dB/cm for the TE polarization were measured at the telecom...
متن کاملStrained Silicon-On-Insulator – Fabrication and Characterization
SSOI substrates were successfully fabricated using He ion implantation and annealing to relax thin (< 500nm) SiGe buffer layers, bonding and layer transfer processes to realize strained-Si layers onto oxide layers. The reduced thickness of the SiGe buffer possess numerous advantages such as reduced process costs for epitaxy and for reclaim of the handle wafer if the layer splitting is initiated...
متن کاملUltra-high Q and finesse all-pass microring resonators on Silicon-on-Insulator using rib waveguides
Low-loss rib waveguides on Silicon-on-Insulator are used to demonstrate ultra high-Q and finesse all-pass microring resonators with record finesse of 1100 and Q of 613000. Key words— Microring resonators, Silicon-on-Insulator (SOI)
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ژورنال
عنوان ژورنال: Hemijska industrija
سال: 2008
ISSN: 0367-598X,2217-7426
DOI: 10.2298/hemind0803119m